Research and Development

Research of PVD and PACVD technology

• laboratory scale coaters
• technology transfer to industrial scale systems

development of particle sources

• magnetrons
• arc sources
• ion sources

finite element method modeling

• electric and magnetic field
• heat transfer
• mechanical stress
• combined problems

thin film analysis

• basic parameters (thickness, adhesion)
• tribological properties (roughness, friction coefficient, wear rate)
• nanohardness and elasticity modulus
• scanning electron microscopy and microprobe analysis
• special measurement (corrosion, electrical or optical etc.)

plasma diagnostics

• probes
• mass spectroscopy
• optical emission spectroscopy

projects and cooperation with scientific groups