Design

2D and 3D design by:

• Autodesk INVENTOR
• Mechanical Desktop 2004
• AutoCAD 2004

finite element method (FEM) modeling

• mechanical stress
• thermal problems

typical design

• magnetron and arc cathodes (from 25 mm to 3000 mm)
• planetary tables for coating equipment (up to load of 3000 kg)
• special substrate holders and multiple substrate rotation
• heating and cooling of substrates for coating equipment

interconnection with research projects and industrial application