Research and Development

Research of PVD and PACVD technology

  • laboratory scale coaters
  • technology transfer to industrial scale systems

development of particle sources

  • magnetrons
  • arc sources
  • ion sources

finite element method modeling

  • electric and magnetic field
  • heat transfer
  • mechanical stress
  • combined problems

thin film analysis

  • basic parameters (thickness, adhesion)
  • tribological properties (roughness, friction coefficient, wear rate)
  • nanohardness and elasticity modulus
  • scanning electron microscopy and microprobe analysis
  • special measurement (corrosion, electrical or optical etc.)

plasma diagnostics

  • probes
  • mass spectroscopy
  • optical emission spectroscopy

projects and cooperation with scientific groups

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