2D and 3D design by:

  • Autodesk INVENTOR
  • Mechanical Desktop 2004
  • AutoCAD 2004

finite element method (FEM) modeling

  • mechanical stress
  • thermal problems

typical design

  • magnetron and arc cathodes (from 25 mm to 3000 mm)
  • planetary tables for coating equipment (up to load of 3000 kg)
  • special substrate holders and multiple substrate rotation
  • heating and cooling of substrates for coating equipment

interconnection with research projects and industrial application

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